AVR400 System User Guide
4. System Specifications This section provides the specifications for the various components of the AVR400 system. 4.1 Performance Specifications The following table provides the performance specification for the AVR400 system.
Feature Description Measurement range (X-Y-Z) 400 x 300 x 200 mm (15.7 x 11.8 x 7.9 in.) E2 accuracy (X and Y) 2.5 μm + L/ 200 E1 accuracy (Z) 2.5 μm + L/ 200 Scale resolution, X-Y-Z 0 .1 μm
4.2 Hardware and Mechanical Specifications The following table provides the hardware and mechanical specifications of the AVR systems. Feature Unit Dimensions, H × W ×D 915 x 1016 x 1118 mm (36 x 40 x 44 in) Metrology Base Granite Motion Control Motorized X, Y, Z Substage Illumination LED illumination matched to camera optics Surface Illumination LED ring light, quad ring light, coaxial light Operator Controls
Touch-screen monitor, wireless keyboard, wireless optical mouse, pendant with joystick and trackball for manual control. Fixed mount for 1.3 MP camera, bayonet mount for 2 MP camera
Optics Mount
The following figure provides the dimensions of the AVR400 system.
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9985 Revision A
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