Process News Summer 2018 | OI Plasma Technology




“Changing the Art of the Possible” is the company philosophy here at Oxford Instruments. These are not just words, you can see this impact every day. Items such as smart phones, wearable technology and electric vehicles, things we only imagined 10 years ago, are now everyday items and Oxford Instruments has played its part in all of them. Today’s imagined technology such as abundant clean energy will be realised by innovating to novel, smaller, faster and more energy efficient devices. These devices will increasingly rely on more accurate manipulation of matter with the eventual culmination of building devices at an atomic scale. Techniques such as 2D material growth, atomic layer deposition (ALD) and atomic layer etch (ALE) are becoming mainstream and allowing atomic precision on a production scale. Oxford Instruments is in a unique position; in can offer all these solutions on a single cluster platform. How these amazing techniques can be utilised to provide new device solutions is explored in this edition. We also have articles on how plasma can enable biomedical devices, InP lasers and even a micron-sized logo. We hope you enjoy Process News - we know our customers are doing amazing things with our systems around the world and Process News is here to share what they are achieving, and howwe can help you achieve your solutions. If you have any articles that you would like to submit to the next edition of PROCESS NEWS please send them to:

2. Welcome note 3. Aalto results 3. Wafer processing service

4. Atomic Layer Deposition of HfO2 6. Atomic Layer etching What for? 6. NEW improved process for 2D MoS 2


using Raman metrology 7. A Cleanroom fit for business 8. Integrated nano-opto-electro-mechanical sensors for spectrometry applications 10. SEMICONWest 2018: Beyond Smart 12. Ion-beam Nano patterning: accurate and versatile 13. High Volume Semiconductor Device Manufacturers choose Oxford Instruments Plasma Technology for “Lab to Fab” Solutions 14. Materials fabrication processes for biomedical applications 15. Profile control for InP-related III-V quaternary semiconductors in inductively coupled plasma dry etch processes 16. White Papers 17. Webinars 18. Customer Support Portfolio 19. Oxford Instruments Process Solutions Enable Next Generation Datacomms with Ultrafast Photonics Devices Facilitated at AMO GmbH

2 Summer 2018

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