ALD for Quantum Devices White Paper Mar 2020

11. Zieger et al., “Superconducting niobium nitride thin films deposited by metal organic plasma-enhanced atomic layer deposition”, Supercond. Sci. Technol. 26 (2013).

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12. Yang et al., “Comparison of Superconducting Nanowire Single-Photon Detectors Made of NbTiN and NbN Thin Films”, IEE transactions on Applied Superconductivity 28, (2018). 13. Burton et al., “Superconducting NbTiN thin films for superconducting radio frequency accelerator cavity applications”, Journal of Vacuum Science and Technology A 34, 021518 (2016). 14. Morozov et al., “Design and Characterisation of Titanium Nitride Subarrays of Kinetic Inductance Detectors for Passive Terahertz Imaging”, Journal of Low Temperature Physics 193:196–202 (2018)

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