PlasmaPro 100 Brochure

100 Global Service and Support For further information about our Plasma Pro 100 range, please contact your local Oxford Instruments Office Excellent serviceability & low cost of ownership Oxford Instruments Plasma Technology

For more information please email:

The flexible configuration provides ease of access to all aspects of the tool ensuring excellent serviceability and low cost of ownership.

UK Yatton Tel: +44 (0) 1934 837000 Germany Wiesbaden Tel: +49 (0) 6122 937 161 India Mumbai Tel: +91 22 4253 5100

Superior environmental efficiency Plasma Pro 100 has a low heat load and high energy efficiency. The tool has efficient ergonomics and complies with Semi S2/S8 and cluster capability, making this a tool of choice for production users.

Japan Tokyo Tel: +81 3 5245 3261

Customer support & training Our range of service level agreements will be tailored to your needs: • Choice of support coverage up to 24/7 • Scheduled preventative maintenance calls • Managed spares inventory options • Preferential spare part pricing • Process & user maintenance training • Guaranteed response times for support engineer visits and technical hotline calls

PR China Beijing Tel: +86 10 6518 8160/1/2 Shanghai Tel: +86 21 6132 9688

Singapore Tel: +65 6337 6848 Taiwan Tel: +886 3 5788696

US, Canada & Latin America Concord, MA TOLLFREE: +1 800 447 4717


This publication is the copyright of Oxford Instruments Nanotechnology Tools Ltd and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. Oxford Instruments’ policy is one of continued improvement. The company reserves the right to alter without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks and registrations. © Oxford Instruments Nanotechnology Tools Ltd, 2017. All rights reserved. Ref: OIPT/100/2017/001

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