Ardmac Microelectronics

10

Design and Build: Ideal dry cleanroom conditions with a safe pair of hands.

The design solutions required to achieve ideal dry room conditions are made up of 2 critical elements: the architectural envelope, and the HVAC system. All design solutions must ensure the matching of the architectural envelop with the HVAC systems; to achieve the required performance they must be indivisible. The architectural envelope is responsible for meeting the requirements in relation to the provision of a hermetically sealed room. The HVAC system is responsible for ensuring that the required temperature, humidity levels and airborne particle concentrations are maintained. While the design principles for dry rooms remain consistent, the project specific design solutions can vary depending on a number of key design variables which include the following:

Room occupancy levels

Required temperature and relatively humidity levels & control bandwidths

Physical room dimensions

Sensible internal heat loads

Room exhaust rates

Process workflows and equipment layouts

Material and people flows and airlock barriers i.e. MALs and PALs

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