PlasmaPro 1000 PECVD Brochure

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Plasma Pro 1000 Stratum

Plasma Pro 1000 Stratum

System control and global process support

Cost of ownership and global customer support

System control Clear and simple to use software ensures ease of use for process operators, while retaining the full functionality for production facility managers and service staff. • Fully SECS/GEM compatible • The front end visual interface, which controls and monitors the process tool, is configured exactly for the customer’s system • Process recipes are written, stored and recalled through the same software, allowing a comprehensive recipe library to be built • Password controlled user login allows different levels of user access and tasks, from ‘one-button’ run operation to full system control • Continuous system data logging (50ms) ensures effective traceability of each wafer and process run

Cost of ownership and customer support We work with you to create the right system, process, and support package to meet your specific requirements. Our range of Flexible Support Agreements will be tailored to your needs. This can include: • Guaranteed response times for support engineer visits and technical hotline calls • Choice of support coverage up to 24/7 • Scheduled preventative maintenance calls • Managed spares inventory options, including customer dedicated stock, via our parts locations worldwide • Preferential spare part pricing • Process training • Certified training courses for your own engineers in preventative maintenance and first level troubleshooting

Low cost of ownership and world class customer support

Global process support for the lifetime of the tool The priorities of Oxford Instruments’ applications teams are fast turnaround of pre- sale development samples, as well as effective post-sales support for the lifetime of the tool. To achieve this, we have dedicated applications laboratories at our UK headquarters, as well as the USA and Taiwan. In our laboratories we have an installed base of over 25 plasma systems on which our engineers are constantly working towards process and hardware development.

Superior environmental efficiency Plasma Pro 1000 Stratum has a low heat load and high energy efficiency.

The tool’s efficient ergonomics and compliance to Semi S2/S8 and cluster capability make this a tool of choice for production users.

Plasma Pro 1000 Stratum

Plasma Pro 1000 Stratum

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