PlasmaPro 1000 PECVD Brochure

Plasma Pro 1000 Stratum

Technical specifications

Oxford Instruments Plasma Technology

Wheels are removable and for transportation purposes only. All dimensions in mm.

For more information please email:

UK Yatton Tel: +44 (0) 1934 837000 Germany Wiesbaden Tel: +49 (0) 6122 937 161 India Mumbai Tel: +91 22 4253 5100

Load lock configuration

Cluster configuration

Japan Tokyo Tel: +81 3 5245 3261

PR China Shanghai Tel: +86 21 6132 9688 Beijing Tel: +86 10 6518 8160/1/2

Singapore Tel: +65 6337 6848 Taiwan Tel: +886 3 5788696

US, Canada & Latin America Concord, MA TOLLFREE: +1 800 447 4717

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This publication is the copyright of Oxford Instruments plc and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. Oxford Instruments’ policy is one of continued improvement. The company reserves the right to alter, without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks and registrations. © Oxford Instruments plc, 2012. All rights reserved. Ref: OIPT/1000Stratum/2014/001

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