XHEMIS EX-2000 XRR AND EDXRF METROLOGY TOOL
| In-line high-volume semiconductor manufacturing
SYSTEM PARAMETERS
SPECIFICATIONS
Technique
X-ray reflectometry and X-ray fluorescence with XYθ sample stage
Measure ultra-thin single-layer films to multi-layer stacks. Obtain film thickness, density, and roughness by XRR (without standards), obtain thickness / composition by XRF (with standards)
Benefit
Technology
XRR and small-spot XRF
Cu sealed-tube source for XRR; Cr sealed-tube source for XRF, SEMI S2/S8 design
Core attributes
Core features
Auto loader, XRF system, X-ray tube type, SECS/GEM
Core dimensions
1250 (W) x 1825 (H) x 2400 (D) mm (with auto loader)
Thickness, density, roughness, and composition of films on blanket wafers Full-wafer mapping
Measurement Results
PROCESS EDXRF, XRR, AND XRD METROLOGY FAB TOOL | Optimized for high-volume manufacturing
XTRAIA MF-2000
SYSTEM PARAMETERS SPECIFICATIONS
Energy dispersive X-ray fluorescence (EDXRF), Micro x-ray fluorescence (µXRF), and X-ray reflectivity (XRR) High-throughput Measurement of Product Wafers From Ultra-thin Films to Micron-order Films, Applicable to a Wide Range of Thickness and Film Types.
Technique
Benefit
Technology
Analytical flexibility to measure
Monochromatic, micro-spot X-ray beam modules (COLORS ) enables a choice of optimized X-ray sources. Ultra-fast detector with up to 108 dynamic range and with monochromatic, micro-spot X-ray sources. Wafer Loader.
Core attributes
Core features
Core dimensions
1612 （ W ） ×3395 （ D ） ×2118 （ H ） mm
TFXRD 200
XRD SYSTEM MAPPING TOOL | For Near-fab Applications
SYSTEM PARAMETERS
SPECIFICATIONS
Technique
X-ray diffraction (XRD), rocking curve (XRC) and reflectivity (XRR)
High precision goniometer with full mapping XY-stage for large wafers (200mm, 300mm)
Benefit
Technology
High precision θ - 2θ horizontal goniometer with large cradle
Core attributes
Up to 300mm wafer full mapping XY stage
PhotonMax high-flux 9 kW rotating anode X-ray source, Confocal Max- flux 800W rotating anode X-ray source, HyPix-3000 high energy resolution 2D HPAD detector
Core options
Computer
External PC, MS Windows® OS, SmartLab Studio II software
Core dimensions
Approx. 1900 (W) x 2200 (H) x 1900 (D) mm
Made with FlippingBook flipbook maker