4 System Specifications
The following table provides the specifications for the KMR system components.
4.1 Performance Specifications
The following information provides the performance specifications of the KMR system.
Feature
Specification
Measurement range (X-Y)
200 x 100 mm (7.9 x 3.9 inches)
Z travel
125 mm (5 inches)
Resolution
0.5 µm (0.00002 inch)
Accuracy
± (4µm + L/50)
Metrology means
X and Y encoders
4.2 Hardware and Mechanical Specifications
The following table provides the hardware and mechanical specifications of the KMR systems.
Feature
Specification
Unit Dimensions
545 x 460 x 445 mm (21.5 x 18 x 17.5 inch)
Metrology base
Precision aluminum
Motion Control
Manual X, Y, Z
Stage capacity
10 Kg (22 lbs)
Substage illumination
LED illumination
Surface illumination
LED ring light
Operator controls
Touch screen DRO, wireless optical mouse
Optics mount
Fixed mount 2.0 megapixel camera
The following figures provide the dimensions of the KMR system.
Figure 7. KMR System Dimensions
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