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Helios G4 Scanning Electron Microscope – Dual Beam ELECTRON MICROSCOPY

ELECTRON MICROSCOPY

Zeiss Merlin Scanning Electron Microscope

The Helios G4 Scanning Electron Microscope (SEM) is used to image and an- alyze the elemental composition of a wide range of materials and devices. This scanning electron microscope is equipped with a Dual beam (e- beam and Ga beam) for FIB prep or slice and view experiments. It is also equipped with a cryo stage that allows for examination of frozen specimens. This course offers an overview of the basic principles of electron beam/sample interaction, secondary electrons, back-scattered electrons, and X-ray signal generation. Users will learn to operate the SEM at the optimal high-tension and beam current according to the nature of their sample. They will tune and perform alignments of the microscope to reach optimal imaging conditions, operate the FIB to prepare thin lamella, and perform slice and view operations. Upon com- pletion of the course, users will be able to use FIB for various applications. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who need to understand the topography and the chemical composition of a sam- ple. Experience in basic SEM imaging techniques is required. PREREQUISITES • Active Badger account

The Zeiss Merlin Scanning Electron Microscope (SEM) is used to image and analyze the elemental composition of a wide range of materials and devices. This scanning electron microscope is equipped with electron beam lithography (Raith) and an EDS system (Oxford) for chemical analysis. This course introduces the basic principles of electron beam/sample interaction, secondary electrons, back-scattered electrons, and X-ray signal generation. Us- ers will learn to operate at the optimal high-tension and beam current according to the nature of their sample; tune and perform alignments of the microscope to reach optimal imaging conditions; and work in Field-Free and Immersion modes. Integrating analysis into an application and writing data to File will also be cov- ered. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who need to understand the topography and the chemical composition of a sam- ple. Experience in basic SEM imaging techniques is required. PREREQUISITES • Active Badger account

DURATION 9 hours, divided into 2-3 sessions FREQUENCY Monthly

DURATION 9 hours FREQUENCY Twice monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5

Learn Develop Excel

Specialized Instrument & Method Training Catalog

Edition 1, Se p te mber 2020

173

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