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Practical Training: Dektak 150 Surface Profiler SURFACE SCIENCE

SURFACE SCIENCE

Practical Training: Secondary Ion Mass Spectrometry (SIMS)

The Dektak 150 surface profiler is an advanced thin and thick film step height measurement tool capable of measuring steps below 100 Å. It also measures samples up to six inches in dimension and up to four inches thick. The Dektak 150 can be used to profile surface topography and waviness, as well as to mea- sure surface roughness in the nanometer range. The system provides a step- height repeatability of 0.6 nm. This course gives an overview of the specifications of the characterization tool. Users will learn how to prepare and transfer samples, as well as how to acquire, process, and export data. Safety aspects will also be discussed. Upon comple- tion of the course, users will be qualified to operate the Dektak Surface Profiler instrument. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST, and their collaborators from academia and industry, who are interested in investi- gating the topography of their sample surfaces. PREREQUISITES • Active Badger account

Secondary Ion Mass Spectrometry, (SIMS), is a powerful tool for surface charac- terization. This technique is based on the mass determination of ionized particles that are emitted from the topmost layers following the impact of an energetic beam with the solid surface. The main strength of the SIMS technique is the identification of the surface composition with a very high sensitivity down to ppb. SIMS is also widely employed for depth profiling allowing to the sample compo- sition to be determined in depth. This course gives an overview of the specifications of the characterization tool. Users will learn how to prepare and transfer samples, as well as how to acquire, process, and export data. Safety aspects will also be discussed. Upon comple- tion of the course, users will be qualified to operate the SIMS instrument. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST, and their collaborators from academia and industry who would like to investigate the elemental distribution in depth of any bulk, thin film, and multilayer samples. PREREQUISITES • Active Badger account

DURATION 2 hours FREQUENCY Twice monthly

DURATION 5 sessions, 3 hours each session FREQUENCY Twice monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 3

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 3

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Specialized Instrument & Method Training Catalog

Edition 1, Se p te mber 2020

193

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