Nanofabrication Core Laboratory CLEANROOM The world-class Cleanroom facility hosts the functional areas of Metrology and Bonding, Etching, Deposition and Thermal Diffusion, and Lithography and Mask-mak- ing. Cleanliness is maintained to a high standard (ISO 14644), which is strictly observed and enforced to min- imize contamination. High-level expertise and support in wafer fabrication, processing, and characterization is provided to users.
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Specialized Instrument & Method Training Catalog
Edition 1, September 2020
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