Core Labs Training_Catalogue-v2 (edit 2)-web

Introduction to Cleanroom Safety and Protocol CLEANROOM

CLEANROOM

Atomic Layer Deposition (ALD)

Atomic Layer Deposition (ALD) is a process by which thin films of various materi- als from a gas state (vapor) to a solid state can be deposited on substrates at lower temperatures than that of standard CVDs. In ALD processes, deposition is achieved by introducing reactant species in turn (not simultaneously) to the process chamber, which induces a chemical reaction and results in the reaction product being deposited on the substrate in monolayers. This course gives participants an understanding of the ALD process (reactive chemicals, plasma generation and control with pressure for plasma ALD, chem- ical dosing and purge times, and temperature). Users will learn about tool setup and software, as well as how to troubleshoot errors. Sample loading, set-up of recipes, and operation modes will all be discussed. Participants will also be instructed on result analysis and interpretation, process issues, and techniques for improvement. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST working in micro and nanofabrication. PREREQUISITES • Active Badger account

This course is about cleanroom working guidelines and procedures. Attendees will receive theoretical training on basic cleanroom operation information, focus- ing on the cleanroom ventilation system, particle behavior, safety protocols, and working with hazardous chemicals. A tour of the cleanroom is also conducted, highlighting essential cleanroom requirements such as gowning and emergency evacuation procedures. Upon successful completion of the course, participants receive a certificate. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST, and their collaborators from academia and industry, who will use the cleanroom for education or research purposes. This course is also offered to vendors, con- tractors, and service providers that will perform support services for the clean- room. PREREQUISITES • Active Badger account

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training

• Cleanroom Safety Training • Basic Wet Bench Training MAXIMUM PARTICIPANTS 4 DURATION 2 hours FREQUENCY Monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 40 DURATION 4 hours FREQUENCY Monthly

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Specialized Instrument & Method Training Catalog

Edition 1, Sept e mber 2020

225

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