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Plasma Enhanced Chemical Vapor Deposition (PECVD) CLEANROOM

CLEANROOM

Electron-beam Evaporator Training

PECVD is a process by which thin films of various materials from a gas state (vapor) to a solid state can be deposited on substrates at a lower tempera- ture than that of standard CVD. In PECVD processes, deposition is achieved by introducing reactant gases between parallel electrodes and the capacitive coupling between the electrodes excites the reactant gases into a plasma, which induces a chemical reaction and results in the reaction product being deposited on the substrate. In this course, users will gain understanding of the plasma deposition process. Participants will learn about tool setup and software, as well as loading samples, set-up of recipes, operation modes, understanding errors, and tool standby sta- tus. Result analysis and interpretation, and process issues and techniques will also be discussed. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST working in micro and nanofabrication. PREREQUISITES • Active Badger account

E-beam evaporation is a physical vapor deposition (PVD) technique, where an intense electron beam is emitted from a filament to strike a source material and vaporize it within a vacuum environment. The vaporized atoms condense on the substrate to form a thin film. The e-beam evaporator has the capability to deposit up to four different materials (metal and oxide) without opening the chamber. This course introduces users to the E-beam evaporator technique. Participants will gain an understanding of the system’s vacuum control, how to load and un- load samples, and how to set up the deposition parameters and recipe. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who want to deposit thin films by using e-beam evaporator. PREREQUISITES • Active Badger account

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5 DURATION 2 hours FREQUENCY Monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training

• Cleanroom Safety Training • Basic Wet Bench Training MAXIMUM PARTICIPANTS 4 DURATION 2 hours FREQUENCY Monthly

Learn Develop Excel

Specialized Instrument & Method Training Catalog

Edition 1, Sept e mber 2020

227

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