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Magnetron Sputter Training CLEANROOM

CLEANROOM

Rapid Thermal Processing Training

Magnetron Sputter is a physical vapor deposition process in which positively charged ions generated in plasma are accelerated by an electrical field to strike the negative target with sufficient energy to dislodge and eject atoms from the target. The ejected atoms condense on substrate to form a thin film. This course introduces the Magnetron Sputter process. Participants will learn about vacuum control, loading and unloading samples, deposition parameters and recipe setup, and automatic and manual controls. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who want to deposit thin films by using magnetron sputter. PREREQUISITES • Active Badger account

The JetFirst 200C system is an advanced bench-top Rapid Thermal Process- ing (RTP) system with multi-gas capabilities, such as O 2 , Ar, and 4%H 2 /N 2 . The tool is equipped with closed loop temperature control set by a thermocouple. The system consists of a cold-wall reaction chamber for wafers up to 200mm in diameter, and a powerful infrared lamps furnace with an integrated computer control system and software interface to provide simple recipe programming and full process monitoring. This course introduces users to the JetFirst 200C system and its principles. Participants will learn about gas and vacuum control, recipe programming, and process monitoring. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who want to use the RTP. PREREQUISITES • Active Badger account

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5 DURATION 2 hours FREQUENCY Monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5 DURATION 2 hours FREQUENCY Monthly

Learn Develop Excel

Specialized Instrument & Method Training Catalog

Edition 1, Sept e mber 2020

229

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