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Surface Stylus Profilometer CLEANROOM

CLEANROOM

Zygo Optical Profiler

The surface stylus profilometer is an advanced thin and thick film step height measurement tool. It is capable of measuring steps from 10 nm to 262 μm. It uses a contact stylus which moves vertically in contact with the sample and the measurement is done based on the stylus displacement as a function of position. It also can profile surface topography and waviness, as well as measure surface roughness in the nanometer range. This course introduces the surface stylus profilometer and its working princi- ples. Participants will learn about tool setup and software GUI, sample loading, parameter setting, starting the measurement, data processing, and unloading. Safety precautions will also be discussed. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST working on micro and nanofabrication. PREREQUISITES • Active Badger account

NewView 7300-Zygo Optical Profiler, using ZYGO’s patented technology for Coherence Scanning Interferometry (CSI), is a powerful tool to characterize and quantify surface roughness, step heights, critical dimensions, and other topo- graphical features with excellent precision and accuracy. All measurements are fast and nondestructive. This course introduces the principles of Zygo CSI technology. Participants will learn about tool setup and software GUI, sample loading, parameter setting, starting the measurement, data processing, and unloading. Safety precautions will also be discussed. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST working on micro and nanofabrication. PREREQUISITES • Active Badger account

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training • Cleanroom Safety Training MAXIMUM PARTICIPANTS 4 DURATION 2 hours FREQUENCY Monthly

DURATION 2 hours FREQUENCY Monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training • Cleanroom Safety Training • Basic Wet Bench Training MAXIMUM PARTICIPANTS 4

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Specialized Instrument & Method Training Catalog

Edition 1, Sept e mber 2020

231

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