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Pulsed Laser Deposition Training THIN FILMS

THIN FILMS

Rapid Thermal Processing Training

The JetFirst 200C system is an advanced bench-top Rapid Thermal Process- ing (RTP) system with multi-gas capabilities, such as O 2 , Ar, and 4%H 2 /N 2 . The tool is equipped with closed loop temperature control set by a thermocouple. The system consists of a cold-wall reaction chamber for wafers up to 200 mm in diameter, and a powerful infrared lamps furnace with an integrated computer control system and software interface to provide simple recipe programming and full process monitoring. This course introduces users to the JetFirst 200C system and its principles. Participants will learn about gas and vacuum control, recipe programming, and process monitoring. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who want to use the RTP. PREREQUISITES • Active Badger account

The Neocera Pioneer 180 is an “MBE-like” pulsed laser deposition system (PLD). It is capable of fabricating epitaxial films, with thicknesses ranging from a few to several hundred nanometers. The system is equipped with a radiative heater capable of producing temperatures up to ~ 850 °C. The working gas pressure is controlled via the turbo pump speed and gas flow rate, in the range of 1 to 500 mTorr. This course gives an introduction PLD vacuum systems, pressure control, the excimer laser, and the Neocera Pioneer 180. Participants will learn about the laser beam path and alignment, how to setup deposition parameters, and the general functioning of the systems which control process parameters. PARTICIPANT PROFILE This course is intended for students and research professionals from KAUST who want to use PLD for thin film deposition. PREREQUISITES • Active Badger account

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5 DURATION 2 hours FREQUENCY Monthly

DURATION 3 hours FREQUENCY Monthly

• Laboratory Safety Training • Hazardous Waste Training • Emergency Incident Preparedness Training MAXIMUM PARTICIPANTS 5

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Specialized Instrument & Method Training Catalog

Edition 1, Sept e mber 2020

257

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