Augmented Reality Brochure

SLANTED SURFACE RELIEF GRATING

Precision and scalability Oxford Instruments Plasma Technology are pioneers of augmented reality waveguide combiner technology. We have many years of expertise in etching slanted features over large areas.

Ion beam technology Strict manufacturing tolerances are required to achieve maximum coupling efficiency. This solution focuses on delivering precise control of feature angle and CD to maximise yield.

Deposition

Optical combiners for AR

Unique benefits

 Excellent CD and profile control

Waveguide technology is a promising approach to deliver high Field of View (FOV) for immersive AR experience. Surface Relief Gratings (SRG) enables light coupling into waveguide combiners and are critical for controlling the efficiency of the combiner. Years of innovation enables us to produce market leading uniformity over 200 mm wafers.

 Patented grid designs to allow uniform large-area angled etch capability for specific etch angles  Unique uniformity optimisation capability for any angle of etch feature using innovative Oxford Instruments technology  Unique large-area cost-effective angled etch capability

Mask opening Cobra®

Resist strip

Cr mask dry etching ICP.

 Excellent angle control

Grating etch

Ionfab ®

Unique patent pending technology delivers excellent depth uniformity.

Mask wet

Example of AR headset.

Angled SiO 2

grating CAIBE.

Anti adhesive treatment

Our solution for SRGs

 High yield on large uniform areas

 Angle > 45° enables high efficiency grating couplers  Process flexibility for a range of device designs

Subject to mask quality and layer stack.

Simplified combiner structure.

Ionfab system.

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For further information please contact your local Oxford Instruments Plasma Technology office.

Worldwide Service

Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

Email plasma@oxinst.com UK Yatton +44 (0) 1934 837000 Germany Wiesbaden +49 (0) 6122 937 161 India Mumbai +91 22 4253 5100

We can provide:

 Flexible service agreements to meet your needs

 Tailored system training courses

 System upgrades and refurbishments

Japan Tokyo +81 3 5245 3261

 Immediate access to genuine spare parts and accessories

PR China Beijing +86 10 6518 8160/1/2

Shanghai +86 21 6132 9688

Singapore +65 6337 6848 Taiwan +886 3 5788696

US, Canada & Latin America Concord, MA TOLLFREE: +1 800 447 4717

visit plasma.oxinst.com

Oxford Instruments, at Yatton, UK, operates Quality Management Systems approved to the requirements of BS EN ISO 9001. This publication is the copyright of Oxford Instruments plc and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. Oxford Instruments’ policy is one of continued improvement. The company reserves the right to alter without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks and registrations. Certain processes are not offered in a few countries, respecting local patents.

© Oxford Instruments plc, 2019. All rights reserved. Ref: OIPT/AR/2020/001

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