SLANTED SURFACE RELIEF GRATING
Precision and scalability Oxford Instruments Plasma Technology are pioneers of augmented reality waveguide combiner technology. We have many years of expertise in etching slanted features over large areas.
Ion beam technology Strict manufacturing tolerances are required to achieve maximum coupling efficiency. This solution focuses on delivering precise control of feature angle and CD to maximise yield.
Optical combiners for AR
Excellent CD and profile control
Waveguide technology is a promising approach to deliver high Field of View (FOV) for immersive AR experience. Surface Relief Gratings (SRG) enables light coupling into waveguide combiners and are critical for controlling the efficiency of the combiner. Years of innovation enables us to produce market leading uniformity over 200 mm wafers.
Patented grid designs to allow uniform large-area angled etch capability for specific etch angles Unique uniformity optimisation capability for any angle of etch feature using innovative Oxford Instruments technology Unique large-area cost-effective angled etch capability
Mask opening Cobra®
Cr mask dry etching ICP.
Excellent angle control
Unique patent pending technology delivers excellent depth uniformity.
Example of AR headset.
Angled SiO 2
Anti adhesive treatment
Our solution for SRGs
High yield on large uniform areas
Angle > 45° enables high efficiency grating couplers Process flexibility for a range of device designs
Subject to mask quality and layer stack.
Simplified combiner structure.
For further information please contact your local Oxford Instruments Plasma Technology office.
Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.
Email email@example.com UK Yatton +44 (0) 1934 837000 Germany Wiesbaden +49 (0) 6122 937 161 India Mumbai +91 22 4253 5100
We can provide:
Flexible service agreements to meet your needs
Tailored system training courses
System upgrades and refurbishments
Japan Tokyo +81 3 5245 3261
Immediate access to genuine spare parts and accessories
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Oxford Instruments, at Yatton, UK, operates Quality Management Systems approved to the requirements of BS EN ISO 9001. This publication is the copyright of Oxford Instruments plc and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. Oxford Instruments’ policy is one of continued improvement. The company reserves the right to alter without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks and registrations. Certain processes are not offered in a few countries, respecting local patents.
© Oxford Instruments plc, 2019. All rights reserved. Ref: OIPT/AR/2020/001Page 1 Page 2-3 Page 4
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