AVR Manual

AVR200 and AVR300 User Guide

System Specifications

4.

This section provides the specifications for the various components of the AVR systems.

4.1 Performance Specifications

The following table provides the performance specification for the AVR systems.

Feature

AVR200

AVR300

Measurement range (X-Y-Z) 200 x 100 x 200 mm (8 x 4 x 8 in) 300 x 200 x 200 mm (12 x 8 x 8) E2 accuracy (X and Y) 1.9 µm + 5L/1000 1.9 µm + 5L/1000 E1 accuracy (Z) 2.5 μm + 5L/1000 2.5 μm + 5L/1000 Scale resolution, X-Y-Z 0.1 μm 0.1 μm

4.2 Hardware and Mechanical Specifications

The following table provides the hardware and mechanical specifications of the AVR systems.

Feature

AVR200

AVR300

Unit Dimensions, H × W ×D 865 x 520 x 625 mm (34” x 20.5” x 24.5”)

865 x 740 x 850 mm (34” x 29.2” x 33.5”)

Metrology Base

Granite

Motion Control

Motorized X, Y, Z

Substage Illumination

LED illumination matched to camera optics

Surface Illumination

LED ring light, quad ring light, dome light, coaxial light

Operator Controls

Touch-screen monitor, wireless keyboard, wireless optical mouse, pendant with joystick and trackball for manual control. Fixed mount for 1.3 MP camera, bayonet mount for 2 MP camera, or fixed mount 5.0 MP camera (for 0.14X lens option)

Optics Mount

The following figures provide the dimensions of the AVR200 and AVR300 systems.

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6106 Revision D

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