AVR200 and AVR300 User Guide
Table of Contents
1. About This Guide..................................................................................................................................5
1.1 Purpose........................................................................................................................................5 1.2 Scope...........................................................................................................................................5 1.3 Audience ......................................................................................................................................5 1.4 Prerequisites ................................................................................................................................5 1.5 Conventions .................................................................................................................................5 1.6 Warranty ......................................................................................................................................6 1.7 Disclaimer of Liabilities ................................................................................................................6 1.8 Copyright and Trademark Information .........................................................................................6 1.9 Related Production Information ...................................................................................................6
2. Regulatory and Environment Standards............................................................................................7
2.1 Regulatory Compliance ...............................................................................................................7 2.2 Environmental Conditions............................................................................................................8 2.3 Safety Considerations..................................................................................................................8
3. The AVR200 and AVR300 Systems...................................................................................................11
3.1 Overview....................................................................................................................................11 3.2 Features and Capabilities ........................................................................................................11 3.3 AVR Configurations and Options...............................................................................................12 3.4 AVR System Components .........................................................................................................13 3.4.1 X-Y Stage..........................................................................................................................13 3.4.2 Z-Column ..........................................................................................................................13 3.4.3 Motorized Z-Track .............................................................................................................13 3.4.4 MetLogix M3 Metrology Software .....................................................................................14 3.4.5 Lens Options .....................................................................................................................15 3.4.6 Lighting Control .................................................................................................................16 3.4.7 Touch Probe Option ..........................................................................................................17 3.4.8 Rotary Stage Options........................................................................................................18 3.4.9 Operator Controls and Interfaces......................................................................................19 3.4.10 Workstation .......................................................................................................................19
4. System Specifications .......................................................................................................................21
4.1 Performance Specifications .......................................................................................................21 4.2 Hardware and Mechanical Specifications..................................................................................21 4.3 Electrical Specifications ...........................................................................................................23 4.3.1 Electrical Power ................................................................................................................23 4.4 Optical Specifications...............................................................................................................24 4.5 Computer and Software Specifications .....................................................................................25 4.6 Touch Probe Specifications .......................................................................................................25 4.7 Rotary Stage Specifications.......................................................................................................27 4.8 Workstation Specifications.........................................................................................................29
5. Installation and Setup ........................................................................................................................31
5.1 Planning the Placement of Equipment ......................................................................................31 5.2 Moving the Equipment ...............................................................................................................31 5.3 Uncrating the Equipment ...........................................................................................................32 5.4 Removing Shipping Retainers ...................................................................................................33 5.5 Setting Up the System..............................................................................................................35 5.6 On-Site Installation, Calibration and Training ............................................................................36
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