Atomfab ALD Brochure

PACE PERFORMANCE PLASMA

The fastest remote plasma high volume manufacturing ALD system for GaN power and RF devices.

FAST PACE | LOW DAMAGE | LOW CoO

The first remote Plasma Atomic Layer Deposition (ALD) system specifically designed for your high volume manufacturing needs. Delivering the fastest, low damage, low cost of ownership, production plasma ALD processing for GaN power and RF devices. Pace

Solutions for your production needs  Low CoO  Quick, easy maintenance  Excellent film uniformity  High material quality  Low particle counts  Low substrate damage  Faster deposition rate, high throughput  Clusterable and automated wafer handling

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ALD offers precisely controlled ultra‑thin films for advanced applications on the nanometre scale, with conformal coating of sensitive substrates structures. Performance Process benefits for passivation of Power/RF devices  Guaranteed processes setup by our engineers  Lifetime process support for additional/new processes  Low-damage plasma processing  High quality deposition with low film contamination  Low particle levels  Short plasma exposure times enabling high throughput  Plasma surface pre-treatments

Advantages of Plasma ALD for GaN, Power & RF devices  With plasma pre-treatment prior to deposition to enhance interface quality  Low damage, uniform deposition  Remote plasma ALD with controlled ion energy from near zero to 30eV  ALD passivation, gate dielectric by Al 2 O 3 films

Increased throughput & improved uniformity to bring remote plasma ALD to high volume manufacturing.

GaN high-electron mobility transistors (HEMTs)

Etched recess

Gate dielectric by ALD for low leakage

Gate

Source

Drain

High mobility through 2DEG at the AlGaN/GaN interface

Recessed-gate geometry to control V-threshold

AlGaN

AlGaN

2DEG

GaN

Buffer

Si substrate

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Performance

Process results

Epitaxy

Plasma ALD Al 2

O

at 300 °C

Specification

Mesa isolation - PECVD & ICPRIE STRATUM® & COBRA®

3

Within wafer thickness uniformity

<±1.0%

Wafer-to-wafer thickness repeatability <±1.0%

Ohmic contact

Breakdown voltage

≥7.0 MV/cm

Passivation PECVD/ICPCVD & ICPRIE STRATUM®, NANOFAB & COBRA®

Gate recess etch ALE COBRA®

Gate passivation by Plasma ALD ATOMFAB®

Gate deposition

Passivation PECVD/ICPCVD & ICPRIE STRATUM®, NANOFAB & COBRA®

Bond pads

Ellipsometry map of 200mm Si wafer with <±1.0% thickness uniformity for 20nm Al 2 O 3

deposited at 300 °C

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Plasma

Atomfab offers unique capability in engineering nanoscale structures and devices. Hardware benefits  Optimisation of chamber, source and wafer position  Easily removable components for maintenance  Low damage to target power/RF GaN devices

Up to 4 liquid/solid precursors with a choice of 600ml or 1200ml sizes with automatic changeover and the option for level sensing.

Excellent precursor and process control

On-board gas pod with 5 MFC controlled gases

Compact remote plasma source up to 200 °C

Easy access to precursor cabinet

200mm wafer electrode up to 400 °C

Cluster options   Clustering to automated handler   Rear access (within MESC) to:   Gas pod   Power distribution

  Precursor cabinet

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Plasma

Software

 SEMI E95 software platform maximising wide screen and multiple displays  Easy-to-use interface and PLC control  Optimised recipe editor for ALD processing  Ultra-fast PLC controller with 10ms minimum step time and 1ms resolution thereafter  Multi-user level password protected ideal for multi-user facilities  All valves fully controllable via graphical interface

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Support

Support contracts

STANDARD CARE Contract

TOTAL CARE Contract

COMPREHENSIVE Care Contract

12, 24 or 36 month contract available from expiration of warranty

Extended hours 0800 - 2200 Mon-Fri. Response time within 4h 1 .

Normal hours 0800 - 1700 Mon-Fri. Response time within 24h 1 .

Available 24/7. Response time within 4h 1 .

Helpdesk and Team Viewer support ***

OI & OEM parts plus provision of consumables**

Replacement or repair of Oxford Instruments and Original Equipment Manufacturer (OEM) parts 2

OI parts only plus 10% discount on OEM parts

OI & OEM parts

Log Viewer software (only available on X20)

Training/Upgrades/Spares

5% discount

10% discount

15% discount

Guaranteed within 5 working days

Guaranteed within 2 working days

Engineer response to site (travel & expenses incl.)

Based on availability

Agreed critical spares within 5 working days

Agreed critical spares within 2 working days

Spare parts supply 3

Based on availability

Customised PM & chamber cleaning plan according to tool type & usage,

Annual planned preventative maintenance (PM) visit including PM kit, System test & validation post PM.

Plasma Help Lightning – merged reality application

Mean time to repair (MTTR) performance target and report*

Uptime performance target and report*

Warranty options

TOTAL CARE Warranty

STANDARD CARE Warranty

COMPREHENSIVE Care Warranty

12 months duration from acceptance of the tool at site or shipment date plus 90 days

Normal office hours 0800 to 1700 Mon-Fri. Response time within 24h 1

Extended office hours 0800 to 2200 Mon-Fri. Response time within 4h 1

Available 24/7. Response time within 4h 1

Helpdesk and Team Viewer support***

Replacement or repair of Oxford Instruments & Original Equipment Manufacturer (OEM) parts 2

Plus provision of consumables**

Log Viewer software (only available on X20)

Guaranteed within 5 working days

Guaranteed within 2 working days

Engineer response to site (travel & expenses incl.)

Based on availability

Agreed critical spares within 5 working days

Agreed critical spares within 2 working days

Spare parts supply 3

Based on availability

Annual planned preventative maintenance (PM) visit including PM kit, system test and validation post PM

✓ ✓ ✓

Plasma Help Lightning – merged reality application

Mean time to repair (MTTR) performance target and report**

Uptime performance target and report*

NOTES

1. Excludes national holidays. OIPT working days.

  Software bug fixes are included.   *Contract specific

2. Within standard operating conditions and agreed usage plan. Please refer to FIS. OEM parts include items such as pumps, generators, chillers, arms, elevators and non OIPT handlers, MFCs, PCs, end point detectors, gauges and VAT valves. 3. Subject to regional location, transport routes and export requirements. Delivery of parts into high risk countries can not be guaranteed.

  **Consumables include items such as selected viewports, centering rings, gaskets, bearings, springs, thermal fluid, orings, filters & wafer clamping parts   ***Team Viewer Support requires remote customer access and loaded software

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For further information about our tools, please contact your local Oxford Instruments Plasma Technology office.

Worldwide Service and Support Oxford Instruments is committed to supporting our customers’ success. We recognise that this requires world class products complemented by world class support. Our global service force is backed by regional offices, offering rapid support wherever you are in the world.

For more information please email: atomfab@oxinst.com UK Yatton Tel: +44 (0) 1934 837000 Germany Wiesbaden Tel: +49 (0) 6122 937 161

We can provide:

 Flexible service agreements to meet your needs  Tailored system training courses  System upgrades and refurbishments  Immediate access to genuine spare parts and accessories

India Mumbai Tel: +91 22 4253 5100 Japan Tokyo Tel: +81 3 5245 3261

PR China Beijing Tel: +86 10 6518 8160/1/2 Shanghai Tel: +86 21 6132 9688

Singapore Tel: +65 6337 6848

Taiwan Tel: +886 3 5788696

US, Canada & Latin America Concord, MA TOLLFREE: +1 800 447 4717

visit plasma.oxinst.com

Oxford Instruments, at Yatton, UK, operates Quality Management Systems approved to the requirements of BS EN ISO 9001. This publication is the copyright of Oxford Instruments plc and provides outline information only, which (unless agreed by the company in writing) may not be used, applied or reproduced for any purpose or form part of any order or contract or regarded as the representation relating to the products or services concerned. Oxford Instruments’ policy is one of continued improvement. The company reserves the right to alter without notice the specification, design or conditions of supply of any product or service. Oxford Instruments acknowledges all trademarks and registrations. Certain processes are not offered in a few countries, respecting local patents. © Oxford Instruments plc, 2019. All rights reserved. Ref: OIPT/ATOMFAB/2019/001

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