Reg. No.02541574 (England)
Statement of Accuracy for Starrett HE400 Series Optical Projectors
Magnification Accuracy:
All the above Starrett Optical Projectors have lens magnifications set and calibrated to the following accuracies:-
Profile:
+/-0.05%.
Surface Illumination:
+/-0.10%. U1 (microns) = +/- ( 12 + (W x 3) ) at any point along its travel.
Linear Accuracy:
Where:
U1 = Maximum Measured Deviation in microns ( μm). W = Weight in Kgs of Load on stage.
Uncertainty of measurement is +/- 2 microns (μm).
Notes:-
Load on stage is to be uniformly distributed across and within work stage top footprint. Best Known Practice (BKP) Linear accuracy is attainable if re-calibration is performed with the weight on the stage.
1000 0093 Revision B
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