Precise Productive Plasma We are an established supplier in the 3D sensing supply chain and our solutions support excellent electro optical performance at maximum yield. We applied our processing know how to enable device cost and performance and maximize production of good die per day.
Market leading solution for front end processing of GaAs based VCSEL
Reliable and precise processing enabled by extremely low footing on sloped and vertical mesa combined with fully automated endpoint.
Clean surface allowing smooth sidewalls with to damage transfer to mesa.
Dense mask deposited at high throughput.
Mesa mask deposition – hardmask PlasmaPro 100 PECVD
P contact fabrication
Mesa mask patterning PlasmaPro 100 Cobra
DBR mesa etch
Mesa mask removal PlasmaPro 100 Cobra
PlasmaPro 100 Cobra
VCSEL IR Emitters 2
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