Telecentric Lens with near infrared support and focus shift correction VS-TCM1-65CO/S-RIR
VS-TM-SWIR Series SWIR Support, Telecentric Microscope Lenses
MTF ［30％］ (lp/mm: unit of resolution)
MTF ［30％］ (lp/mm: unit of resolution)
90 lp/mm
80 lp/mm
20 lp/mm
20 lp/mm
Center
Periphery
Center
Periphery
Image height 70%
Image height 70%
1/4" Support sensor / image circle size 1" 1/3" 1/2" 1/1.8" 2/3"
1/4" Support sensor / image circle size 1/3" 1/2" 1/1.8" 2/3"
1.1"
4/3"
1" 1.1"
4/3"
● Compensating focus shift within the wavelength range from visible light to 1200 nm allows different inspections simply by changing the illumination wavelength. ● Optical Mag. 1.0x ● Lens with enhanced transmittance 600nm and 1200nm
● Optical Mag. 10x ● Resolution equivalent to a microscope ● Long WD design enables high flexibility of illumina- tion system between object and lens. ● Lens with enhanced transmittance from 900nm - 1500nm
Sample Image ▶ Wafer patterns
Sample Image ▶ Wafer patterns
−
Change lighting wavelength × Focus shift correction
VS-TM-SWIR Series
Visible Lens
940nm
1200nm
Visible
Imaging with different backlight wavelengths Alignment marks can be clearly seen
1200nm
Visible
940nm
Surface defects can be clearly seen Imaging with different spot light wavelengths
10x ±5 % 0.7 x 0.8 mm 0.5 x 0.6 mm 0.4 x 0.5 mm 55.3 mm ±2 245.6 mm 22.0 0.230 0.02 mm 0.08 % 90 % Short Wave IR C-Mount 17.526 mm 2/3" Built-in M 35.5 P = 0.5 370 g φ37（max.）x L ＝ 172.8 mm
Optical Mag. FOV (VxH) WD O/I (Object & Imager Distance) Working F/ # NA DOF at PCoC φ0.04mm TV Distortion (2/3") Relative Illuminance (Y=5.5) Wavelength Mount Flange Back Sensor Size (max.) Co-Axial Prism Filter Thread Weight (approx.) Dimension 2/3" 1/2" 1/3"
VS-TM10-55CO-SWIR
1.0x ±5 % 7.1 x 8.4 mm 4.8 x 6.4 mm 3.6 x 4.8 mm 65.0 mm ±2 164.0 mm 7.5 0.067 0.6 mm 0.01 % 98 % 600nm, 1200nm C-Mount 17.526 mm 2/3" Built-in M 25.5 P = 0.5 110 g φ30（max.）x L ＝ 81.5 mm
Optical Mag. FOV (VxH) WD O/I (Object & Imager Distance) Working F/# NA DOF at PCoC φ0.04mm TV Distortion (2/3") Relative Illuminance (Y=5.5) Wavelength Mount Flange Back Sensor Size (max.) Co-Axial Prism Filter Thread Weight (approx.) Dimension 2/3" 1/2" 1/3"
VS-TCM1-65CO/S-RIR
Product Introduction
Microscope-level resolution, even in visible light Telecentric Microscope Lenses VS-TM Series
P 117
94
95
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