White Light Interference optical Unit WLI-Unit
Objectives shown mounted on tubes are optional.
>Non-contact high-accuracy fine surface texture measurement is possible through white light interference: 3D shape measurement, 3D roughness measurement. > Height measurement accuracy not dependent on optical magnification Measurement enabled with high Z-resolution even with low-magnification lens > High aspect ratio measurement Supports high aspect ratio shape measurement through detection not dependent on optical-based NA > High robustness with regard to disturbance vibration > Compact and lightweight Features
Specifications
554-001
554-002
554-003
Code No.
Model
WLI-Unit-003
WLI-Unit-005
WLI-Unit-010
Cable length (m)
3
5
10
Applicable objective lens *Optional selection Tube lens magnification Focal range (f mm) Scanning mechanism
WLI Plan Apo series
1X
WLI-Unit Sensor Head
100
Mitutoyo Objective Lens Scanner
Size/weight
108x68x191 mm / 1.7 kg
Z motion range
8000 µm Standard 1900 µm
Measurement mode
High throughput
High resolution
WLI measurement (WLI-Unit-003/005/010 common)
WLI measurement Z range Throughput @20 μm range
2100 µm
1700 µm
3.0 s
4.0 s
6.0 s
Z resolution
− −
4 nm
Z repeatability ( σ )
40 nm
I/F
WLI-Unit sensor head terminal/stop connector/GigaBit Ethernet: 2 ch
AC100 ～ 240 V / 50, 60 Hz
Rated voltage
WLI-Unit Controller
Max. power consumption
20 W
Size/weight
196x180x108 mm / 2.3 kg
WLIPAK
WLI-Unit control library (SDK), sample code, WLIPAK Sample GUI
Software
WLI-Unit calibration SW
Pixel calibration
Analysis software (recommended option)
MCubeMap
Other
Frame grabber/PC
Matrox frame grabber/PC separate
Recommended PC specifications OS: Windows 10 Pro 64 bit/Windows 11 Pro 64 bit, CPU: Xeon Processor 8 Core (2.0 GHz or above), memory: 8 GB or above, storage: 25 GB or above, optical drive: DVD-ROM drive (for software installa - tion), communication port: RJ-45 × 1 port (EtherNET), extension slots: PCI Express 3.0 × 8 or above
16
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