PREN - 1457(5) - Microscope Units and Objectives (UV, NUV, …

MICROSCOPE UNITS AND OBJECTIVES (UV, NUV, VISIBLE & NIR REGION)

PRE 1457(5)

Wide range of microscope units and objective lenses lineup based on Mitutoyo's proprietary optical technologies and precision processing technologies cultivated over many years.

Used by customers around the world for a wide variety of applications.

Applications : Production of semiconductors, electronics, liquid crystals, etc.

Optical systems for quality control systems and experimental research equipment Built-in optical units for visual inspection systems Observation of microorganisms and other moving objects

* We also accept custom orders for products not listed in this catalog, so please feel free to contact us for more information.

Ref.:“Microbio-World Ver.7,” >（http://elfe.miyakyo-u.ac.jp/opac/2008/03/cd_2.html）

Applications

Optical inspection with wide field of view

White light interference analysis

WLI-U + interference objective lens *System example with fixed stand/stage

WIDE VMU-HR

Lineup supporting various observation methods, including bright-field, dark- field, polarizing, differential interference, near infrared, high resolution, etc. Inspection process can be streamlined with wide field of view model.

Compact design realizes non-contact high-accuracy fine surface shape analysis through white light interference. ⇒ 3D shape measurement, 3D roughness measurement

Laser fine machining

IR analysis/inspection

Flaking of polyimide membrane

WIDE VMU-HR + NIR objective

UV laser application using VMU-L4B (Source of photographs: V-Technology Co.,Ltd.)

Infrared analysis inspection is possible in combination with a microscope unit supporting NIR series objective lenses. > Transmission analysis of silicon materials > Non-destructive evaluation of MEMS interiors > Internal observation of semiconductor packages (IC)/wafer junction void evaluation > Infrared spectral characteristics analysis, etc.

Objectives compatible with YAG lasers (1064 nm, 532 nm, 355 nm and 266 nm) allow high precision and quality work. > Removal of protective films/organic films, etc. > Cutting of IC wiring (Au, Al) and exposure of lower layer pattern > Fine photomask and FPD repair, etc Color filter working

High/low magnification microscope (dual-camera)

All-focus image generation

2/3 inch Camera (low magnification)

1/2 inch Camera (high magnification)

Two cameras can be used by mounting a constant magnification camera mount on the VMU-LB/LB4 laser port. ⇒ The same area can be observed simultaneously at different magnification (Low magnification: 2/3" camera, high magnification: 1/2" camera, etc.)

TAGLENS-T1

Ultra-high-speed focus range variation from low to high magnification lens, no mechanical vertical drive for focused images, arbitrary cross-section image acquisition possible. *For details, see the No. 14025 TAGLENS catalog

Contents Microscope unit for incorporating in equipment VMU ....................................................................................... 6 White Light Interference optical Unit WLI-U ............................................................................................. 16 Microscope unit FS70 ...................................................................................... 20 Objectives for bright-field (long working distance) M Plan Apo ...................................................................... ・ 26 Objectives for bright-field (with cover-glass thickness compensation) G Plan Apo ....................................................................... 2・8 Objectives for bright/dark-field (long working distance) BD Plan Apo .................................................................... 2・9 Near-infrared objectives for bright-field M Plan Apo NIR ............................................................. ・ 30 Near-infrared objectives for bright-field (with cover-glass thickness compensation) LCD Plan Apo NIR ......................................................... ・ 31 Near-ultraviolet objectives for bright-field M Plan Apo NUV ............................................................ 3・2 Near-ultraviolet objectives for bright-field (with cover-glass thickness compensation) LCD Plan Apo NUV ....................................................... 3・3 Ultraviolet objectives for bright-field M Plan UV ......................................................................... 3・4 Ultraviolet objectives for bright-field (with cover-glass thickness compensation) LCD Plan UV ..................................................................... 3・5 Tube lens MT ......................................................................................... 3 6 Objectives for measuring microscopes ML ........................................................................................ 3・7 Objectives for centering microscopes CF ........................................................................................... 3 8 Wide field of view eyepieces & reticles WF ......................................................................................... 3 9 Reference: Specifications of Objective Threads/ Transmission of Mitutoyo Objectives ....................... 4・ 0 Commentary: Laser Operating Method and Precautions ............. ・ 41 Glossary ..................................................................................... 4・2

Find out more in our video:

https://bcove.video/3Kp07QU

You can download the CAD data, spectral transmission characteristics, and focal point on the image side data for each product.

For details, please check our website:

Microscope unit for incorporating in equipment VMU

VMU-V

VMU-H

VMU-LB

VMU-L4B

Objectives shown mounted on tubes are optional.

Features

> Small, lightweight microscope unit > Compatible with infrared optical systems * 1 > Custom-order is available to meet the customers' requirements * 3

> Can be used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers. * 2 (Suitable for cutting, repairing and removing, and processing thin-film) > Models with enhanced rigidity and performance > Custom-order is available to meet the customers' requirements * 3

*1: An infrared source and infrared camera are necessary. *2: The performance and safety of laser-equipped system products is not guaranteed. *3: The design and manufacturing of the VMU series can be adapted to meet the customers’ requirements: differential interference observation, dual camera setup (double magnification: high and low), etc.

Specifications

VMU-V 378-505

VMU-H 378-506 Horizontal

VMU-LB 378-513

VMU-L4B

Model No. Code No.

378-514

Camera mounting orientation

Vertical

Vertical (rotatable)

Observation

Bright-field/erect image

Bright-field/Inverted image

Bright-field/erect image

Magnification: 1X; wavelength ( λ ): visible radiation

Optical features

Camera port

C-mount with centering and parfocal adjustment and green filter switch

Mount

C-mount (centering and parfocal adjustment)

Tube lens (correction range)

Built in 1X (visible - NIR)

Built in 1X (NUV - NIR) Magnification: 1X λ : 355/532/1064 nm

Built in 1X (UV - NIR)

Magnification: 1X λ : 266/355/532/1064 nm

Optical tube

Optical features

YAG laser source (fundamental and second, third and fourth harmonic mode) available

YAG laser source (fundamental, second and third harmonic mode) available

Laser port

—

Mount

With parfocal adjustment

Polarizer unit * 1

Available for observation

Available for observation and laser applications

M Plan Apo, M Plan Apo HR (50X, 100X) M Plan Apo SL, G Plan Apo NIR series

For observation

Suitable objective (optional)

NIR series, NUV series

NIR series, NUV series, UV series

For laser cutting

—

Applicable camera

2/3 inch or smaller

Optical system epi-illumination

Telecentric with aperture diaphragm Bright-field illuminated lens tube

Illuminated lens tube

Fiber illumination unit (LED) ( No.176-386 ) , fiber-optic illumination unit (150 W) ( No.176-316 )

Illumination unit (optional)

Main unit mass

650 g

750 g

1270 g

1300 g

*1: M Plan Apo 1X objective should be used together with a polarizer ( 378-710 or 378-715 ). Note : Observe the following precautions when using VMU-LB or L4B with YAG laser source attached. 1. Be aware of the laser power and energy density. Otherwise, the optical system may be damaged. 2. Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.

WIDE VMU-HR

WIDE VMU-BDV

WIDE VMU-BDH

Objectives shown mounted on tubes are optional.

Features

> Observation over a wide field of view (image field of ø30 mm) > Compatible with HR series of high resolving power lens (designed with pupil diameter of ø16.8) > Greatly enhanced brightness on the periphery of the field of view (reduces the dependence on the light distribution characteristics) > Compatible with infrared optical systems * 1 > Small optical observation system (refer to page 9 for the dimensions) *1: An infrared source and infrared camera are necessary.

> Observation over a wide field of view (image field of ø30 mm) > Supports dark-field observation suited to inspection for foreign objects and scratches (instantaneous switching between bright-field and dark-field is possible with illumination light source on/off) > Small design available

Bright-field

Infrared

Dark-field

Specifications

For bright-field observation

For bright/dark-field observation

WIDE VMU-HR

WIDE VMU-BDV

WIDE VMU-BDH

Model No. Code No.

378-519

378-517

378-518 Horizontal

Camera mounting orientation

Vertical

Observation

Bright-field/erect image

Bright/dark-field/erect image

Bright/dark-field/inverted image

Optical features Mount

Magnification: 1X Visible light - Near-infrared light

Magnification: 1X Visible light

Camera port

F-Mount, C-Mount (with aligning and parfocal adjustment mechanism)

Optical tube

Imaging forming (tube) lens

Built in 1X (visible - NIR)

Built in 1X (visible)

Image field

ø30 mm

Polarized unit * 1

Mountable

M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo, NIR series

BD Plan Apo

Objective lens (required option)

Applicable camera

Diagonal line length: 30 mm or less (equivalent to APS-C format)

Telecentric illumination, bright/dark-field illumination optical tube (Dual-port fiber-optic illumination) Bright/Dark-field switching with light source on-off

Optical system epi-illumination

Telecentric (pupil diameter of ø16.8 with aperture diaphragm)

Bright-field illuminated lens tube (rotatable) * 3 LED adapter and fiber adapter included as standard

Bright-field illuminated lens tube (rotatable) * 3

Illuminated lens tube

Illumination unit (optional) * 2

Fiber illumination unit (LED) ( No.176-386 ), fiber-optic illumination unit (150 W) ( No. 176-316 )

Main unit mass 2150 g *1: Polarized observation by bright-field illumination *2: Support for third-party LED illuminators (WIDE VMU-HR only) *3: The fiber (light source) mount orientation can be changed. 1400 g 2000 g

VMU Dimensions

+0.05 +0.1 +0.05 (Compatible with third-party fiber-optic cables) (Compatible with Mitutoyo fiber-optic cable)

ø14

ø14 +0.1

LED Adapter

+0.05

Adapter for Mitutoyo fiber-optic cable

ø10 +0.1

ø8.2

Hexagon socket set screw(M4) for clamping LED light source

LED light source edge position (effective apperture ≧ ø5)

Fiber-optic cable end position

Diagram of LED light source mount

Diagram of fiber mount (VMU)

VMU-V

VMU-H

6.5 6-M4×0.7 screw holes, depth 6 (equal numbers of holes at the same positions on the opposite side) Fiber-optic cable mounting position

59.5 6.5

43.5

3 47

80.5

59.5

C mount

Intermediate image position

17.5

43.5

50 27

3 47

6-M4×0.7 screw holes, depth 6 (equal numbers of holes at the same positions on the opposite side)

Fiber-optic cable mounting position

C mount

(Emblem)

ø43

(optional) Objective

VMU-LB

VMU-L4B

Intermediate image position

25.07

ø3

ø56

Laser mount

ø50

Intermediate image position

C mount

6-M4×0.7 screw holes, depth 6 (equal numbers of holes at the same positions on the opposite side)

66- M- 44××00. 7. 7ssccrreew h o l el ess,, d e p tth 6 (equal numbers of holes at the same positions on the opposite side)

49.5

Fiber-optic cable mounting porstitioionn

3 47

(Emblem)

Objective mount

43.5

ø43

(optional) Objective

6.5

120

59.5

6.5

120

59.5

Workpiece surface

+0.1 +0.05 +0.1 +0.05

ø14 ø10

(Compatible with third-party fiber-optic cables) (Compatible with Mitutoyo fiber-optic cable)

ø14 +0.1

LED Adapter

+0.05

Adapter for Mitutoyo fiber-optic cable

Hexagon socket set screw (M4) for clamping fiber light guide

ø8.2

Hexagon socket set screw(M4) for clamping LED light source

LED light source edge position (effective apperture ≧ ø5)

Fiber-optic cable end position

(Fiber effective diameter of ø5 or greater)

Diagram of LED light source mount

Diagram of fiber mount (WIDE VMU)

WIDE VMU-HR

83.5

3 64

Image position

F mount

Light souce mounting position

4-M4 × 0.7 depth 6 4-M4 × 0.7 depth 6 (Same position and number on the other side)

(Emblem)

Objective mount

Workpiece surface (Optional) Objective

Workpiece surface

WIDE VMU-BDV

WIDE VMU-BDH

146.5

3 64

70.5

110

146.5

F mount Intermediate image position Intermediate image position

46.5

63.5

70.5

3 64

F mount

4-M4×0.7 screw holes, depth 6 (equal numbers of holes at the same positions on the opposite side)

Fiber mounting position (BF)

Fiber mounting position (DF)

27 64

Fiber mounting position (DF)

27 64

(Emblem)

(optional) Objective Objective mount

Workpiece surface

VMU System Diagram

VMU

C-mount compatible analog camera or digital camera

Third-party YAG lasers* 5

Fixed-magnification monitoring camera mount ( 378-087 ) P.13* 4

2X TV adapter unit ( 378-703 )

0.5X TV adapter unit * 1 ( 378-704 ) P.13

VMU-V/H ( 378-505/378-506 )

VMU-LB/L4B ( 378-513/378-514 )

Focusing unit A ( 378-705 ) P.13

Focusing unit B* 2 ( 378-706 ) P.13

Polarizer (B) ( 378-715 ) P.13

Simple stand ( 378-730 ) P.25

Manual revolver nosepiece unit (for BF)* 2 ( 378-707 ) ( 378-717 ) P.12 Quad

Polarizer ( 378-710 ) P.13

Self-aligning power revolver nosepiece unit (for BF) * 3 ( 378-713 ) P.12

Transmitted light unit ( 378-736 ) P.25

LED adapter (02AVB662) P.13

Quintuple

LED spot illumination from various manufacturers

Objectives M Plan Apo series (for observation): All types on P.26 to 28 G Plan Apo series (for observation): All types on P.28 NIR series on P.30 to 31 (for fundamental/second harmonic laser machining) (for near-infrared observation) NUV series on P.32 to 33 (for second/third harmonic laser machining) UV series on P.34 to 35 (for second/fourth harmonic laser machining)

Third-party motorized X-Y stages (50×50 mm)* 6

Fiber-optic illumination unit 150 W ( 176-316 )

X-Y stage (50×50 mm) ( 378-020 )

Fiber illumination unit (LED) ( 176-386 )

P.25

*3: This revolver nosepiece unit cannot be used with focusing unit B ( 378-706 ). For details on mounting position, refer to the figures on page 14. *4: Use this mount when mounting a C-mount camera using the laser port. Use this mount for 2/3-inchor smaller cameras. *5: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *6: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information.

*1: Compatible with 1/2-inch or less C-mount cameras. *2: Use focusing unit B ( 378-706 ) if the distance between the mounting position and VMU main unit isdesired to be as small as possible. If the manual revolver nosepiece unit ( 378- 707 ) is used concurrently, mount the unit in front of the VMU main unit. For details on mounting position, refer to the figures on page 14.

WIDE VMU

F-mount compatible analog camera or digital camera

C-mount compatible analog camera or digital camera

C-mount adapter

WIDE VMU-HR ( 378-519 )

WIDE VMU-BDV/BDH ( 378-517/378-518 )

Focusing unit C ( 378-718 ) P.13

Simple stand ( 378-730 ) P.25

Polarizer (C) ( 378-719 ) P.13

4穴 Bright/dark-field revolver ( 378-725 ) P.12

4穴 Bright-field revolver ( 378-724 ) P.12

Bright/dark-field power revolver ( 378-727 ) P.12 Quad

Bright-field power revolver ( 378-726 ) P.12 Quintuple

Transmitted light unit ( 378-736 ) P.25

Objectives

BD Plan Apo series (for observation) All types on P.29

M Plan Apo series (for observation) All types on P.26 to 28 G Plan Apo series (for observation) All types on P.28 NIR series on P.30 to 31 (for fundamental/second harmonic laser machining) (for near-infrared observation)

LED adapter (included as standard) P.13

Third-party motorized X-Y stages (50×50 mm)* 1

Fiber illumination unit (LED) ( 176-386 )

Fiber-optic illumination unit 150 W ( 176-316 )

X-Y stage (50×50 mm) ( 378-020 )

P.25

LED spot illumination from various manufacturers

*1: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information.

Optional Accessories for VMU

Up to 4 objective lenses can be mounted. Manual revolver

No.378-724

No.378-725

Installed on 378-717 VMU-V with optional objectives

Installed on 378-724 WIDE VMU-HR with optional objectives

Bright-field revolver

Bright/dark-field revolver

378-707

378-717

378-724

378-725

Code No.

Observation method

Bright-field

Bright/dark-field

4 (1 reference hole and 3 holes with centering and parfocal adjustment)

4 (reference hole)

No. of objective mounts

4 (reference hole)

Mass

780 g

990 g

825 g

755 g

WIDE VMU-BDV WIDE VMU-BDH

VMU-V, VMU-H, VMU-LB, VMU-L4B

WIDE VMU-HR

Applicable models

Up to 5 objective lenses can be mounted on the bright-field power revolver. Up to 4 objective lenses can be mounted on the bright/dark-field power revolver. Power revolver

No.378-726

No.378-727

Installed on No.378-713 VMU-V with optional objectives

Installed on No.378-726 WIDE VMU-HR with optional objectives

Bright-field power revolver

Bright/dark-field power revolver

378-713

378-726

378-727

Code No.

Observation method No. of objective mounts View field adjustment Positioning accuracy

Bright-field

Bright/Dark-field 4 (Reference hole)

5 (1 reference hole and 4 holes with centering adjustment)

±0.5 mm 2 σ = 3 μm

− − − −

Durability (life-time)

1 million repositioning operations

Drive method

DC motor

AC100 V - 240 V Max. power consumption is approx. 6 W

Power supply

AC100 V - 240 V Max. power consumption is approx. 10 W

Output interface * 1

RS-232C * 1 for external PC control

2.9 m * 2 (connection of power revolver and console box)

Cable length

Revolver: 130x47x186 mm,1.8 kg, Console box: 108x63x176 mm,810 g

Revolver: 164x65x137 mm,1.8 kg, Console box: 108x72x193 mm,810 g WIDE VMU-BDV, WIDE VMU-BDH

Dimensions (WxHxD) and mass

VMU-V, VMU-H, VMU-LB, VMU-L4B

WIDE VMU-HR

Applicable models

*1: Optional RS-232C Cable: 12AAA807 *2: The length of cable connecting the power revolver and console box is a safe maximum and therefore Mitutoyo does not guarantee error-free operation if a cable extension is used to increase total cable length.

Focus unit

For manual focusing. With A and C mounted on a simple stand, the stand stage center and optical axis match.

Focus unit A mounted on WIDE VMU-V with an optional objective

Focus unit C mounted on WIDE VMU-HR with an optional objective

Focus unit A

Focus unit B

Focus unit C

378-705

378-706

378-718

Code No.

Travel range

50 mm

Coarse/fine feed Loading capacity

Coarse: 3.8 mm/rev., Fine: 0.1 mm/rev.

Approx. 17.4 kg

Approx. 17.7 kg

Mass

2.9 kg

2.7 kg

VMU-V, VMU-H, VMU-LB, VMU-L4B

WIDE VMU-HR, WIDE VMU-BDV, WIDE VMU-BDH

Applicable models

Provides simplified polarized light observation. Also enhances contrast of low-magnification objectives. Polarizer and analyzer

No.378-719

No.378-710

No.378-715

Polarizer and analyzer

Polarizer and analyzer (C)

378-710

378-715

Code No.

378-719

VMU-V, VMU-H

VMU-LB, VMU-L4B

WIDE VMU-HR, WIDE VMU-BDV, WIDE VMU-BDH

Applicable models

TV adapter unit

C-mount adapters for changing to a higher or lower magnification.

2X TV adapter unit

0.5X TV adapter unit

378-703

378-704

Code No.

Magnification Suitable camera

0.5X

2/3 inch or smaller type

1/2 inch or smaller type

Mass

Approx. 25 g

No.378-703

No.378-704

VMU-V, VMU-H, VMU-LB, VMU-L4B

Applicable models

Camera mount

LED adapter

ø8.2 ø14 +0.1

Can be attached to the laser mount (VMU-LB and VMU-L4B) for dual-camera system.

+0.05

LED Adapter 02AVB662 Approx. 12 g

Hexagon socket set screw(M4) for clamping LED light source

Code No.

Mass

LED light source edge position (effective apperture ≧ ø5)

Camera mount

VMU-V, VMU-H, VMU-LB, VMU-L4B

Applicable models

378-087

Code No.

Suitable camera

2/3 inch or smaller type (C-mount)

*For WIDE VMU, standard accessory.

No. 02AVB662

Mass

Approx. 180 g

VMU-LB, VMU-L4B

Applicable models

No. 378-087

Dimensions of Optional Accessories for VMU

Manual revolver

Bright-field revolver (378-707/378-717)

Bright-field revolver (378-724)

MAX 130* MAX 130*

MAX 78* MAX 78*

MAX 130 76.5

MAX 78

76.5 76.5

Single mount unit

Mount unit Mount unit

Workpiece surface Workpiece surface

* Where M Plan Apo HR100X ( 378-815-4 ) is used * Where M Plan Apo HR100X ( 378-815-4 ) is used

When mounting the revolver on VMU-V or VMU-H Note 1: The lens mount must be removed from VMU. Note 2: The orientation of the revolver can be freely set to the mounting surface.

Note 1: Revolver is installed by removing the single mount unit, but the distance between the mounting position of WIDE VMU main unit and the stage is unchanged. Note 2: Revolver mounting direction is limited to the direction indicated in the figure above.

MAX 77* MAX 77*

MAX 126* 78 MAX 126* 78

Bright/dark-field revolver (378-725)

108 108

MAX 132

MAX 81

76.5

Intermediate lens tube Intermediate lens tube

Mount unit Mount unit

Single mount unit

Workpiece surface Workpiece surface

* Where M Plan Apo NIR HR100X ( 378-864-5 ) is used * Where M Plan Apo NIR HR100X ( 378-864-5 ) is used

When mounting the revolver on VMU-LB or VMU-L4B Note 1: The middle optical tube and lens mount must be removed from VMU. Note 2: The orientation of the revolver can be freely set to the mounting surface.

Power revolver

Bright-field power revolver (378-713)

Bright-field power revolver (378-726)

MAX 130 87

MAX 78

M20×0.5

Single mount unit

Workpiece surface Workpiece surface

88.6 88.6

136

Workpiece surface Workpiece surface

MAX130*

MAX78*

* Where M Plan Apo HR100X ( 378-815-4 ) is used * Where ( 378-815-4 ) is used

When mounting the revolver on VMU-V or VMU-H Note 1: The lens mount must be removed from VMU. Note 2: The orientation of the revolver can be freely set to the mounting surface.

Bright/dark-field power revolver (378-727)

MAX 132

MAX 80

M20×0.5

Mount unit Mount unit Intermediate lens tube Intermediate lens tube

Workpiece surface Workpiece surface

Single mount unit

Workpiece surface Workpiece surface

88.6 88.6

136

MAX126*

MAX77*

* Where M Plan Apo NIR HR100X ( 378-864-5 ) is used * Where ( 378-864-5 ) is used

Focus unit

Hole positions for mounting onto the main unit

(37)

117

(37)

117

5-M4 screw holes, depth 8

Vertical travel

63.5 229

5-M4 screw holes, depth 8

63.5 229

63.5 94 102

23.5

56.5

73 1

(4)

Focusing unit A

32 48 80

63.5 94 102

(37)

87.6

Hole positions for mounting onto the main unit

(4)

5-M4 screw holes, depth 8

Vertical travel

229 63.5

Focusing unit C

63.5 102 94

23.5

26.5

73 1

(4)

Focusing unit B

Polarizer and analyzer

Polarizer and analyzer (C)

Vertical illumination unit with aperture diaphragm

Main body

Camera lens tube

Analyzer

Illuminated lens tube

Analyzer

Illuminated lens tube

Cover ring

Polarizer

Workpiece surface

Installing the polarizer and analyzer on VMU-V or VMU-H Note: The analyzer is installed by removing the Illuminated lens tube. The polarizer is installed by removing the vertical illumination unit with aperture diaphragm.

Note: The polarizer is installed by loosening the cover ring.

The analyzer is installed by removing the camera lens tube.

Vertical illumination tube with aperture diaphragm

Analyzer

Cover ring

Polarizer

When installing the polarizer on VMU-LB or VMU-L4B Note: The analyzer is installed by loosening the cover ring. The polarizer is installed by removing the vertical illumination unit with aperture diaphragm.

TV adapter unit

Camera mount

LED adapter

ø8.2 ø14 +0.1

Intermediate image position C mount 2X adapter lens unit

Intermediate image position C mount 0.5X adapter lens unit

+0.05

Intermediate image position

Hexagon socket set screw(M4) for clamping LED light source

LED light source edge position (effective apperture ≧ ø5)

ø56 0 +0.05 ø38

Dimensions with the 2X TV adapter unit mounted

Dimensions with the 0.5X TV adapter unit mounted

White Light Interference optical Unit WLI-Unit

Objectives shown mounted on tubes are optional.

>Non-contact high-accuracy fine surface texture measurement is possible through white light interference: 3D shape measurement, 3D roughness measurement. > Height measurement accuracy not dependent on optical magnification Measurement enabled with high Z-resolution even with low-magnification lens > High aspect ratio measurement Supports high aspect ratio shape measurement through detection not dependent on optical-based NA > High robustness with regard to disturbance vibration > Compact and lightweight Features

Specifications

554-001

554-002

554-003

Code No.

Model

WLI-Unit-003

WLI-Unit-005

WLI-Unit-010

Cable length (m)

Applicable objective lens *Optional selection Tube lens magnification Focal range (f mm) Scanning mechanism

WLI Plan Apo series

WLI-Unit Sensor Head

100

Mitutoyo Objective Lens Scanner

Size/weight

108x68x191 mm / 1.7 kg

Z motion range

8000 µm Standard 1900 µm

Measurement mode

High throughput

High resolution

WLI measurement (WLI-Unit-003/005/010 common)

WLI measurement Z range Throughput @20 μm range

2100 µm

1700 µm

3.0 s

4.0 s

6.0 s

Z resolution

− −

4 nm

Z repeatability ( σ )

40 nm

I/F

WLI-Unit sensor head terminal/stop connector/GigaBit Ethernet: 2 ch

AC100 ～ 240 V / 50, 60 Hz

Rated voltage

WLI-Unit Controller

Max. power consumption

20 W

Size/weight

196x180x108 mm / 2.3 kg

WLIPAK

WLI-Unit control library (SDK), sample code, WLIPAK Sample GUI

Software

WLI-Unit calibration SW

Pixel calibration

Analysis software (recommended option)

MCubeMap

Other

Frame grabber/PC

Matrox frame grabber/PC separate

Recommended PC specifications OS: Windows 10 Pro 64 bit/Windows 11 Pro 64 bit, CPU: Xeon Processor 8 Core (2.0 GHz or above), memory: 8 GB or above, storage: 25 GB or above, optical drive: DVD-ROM drive (for software installa - tion), communication port: RJ-45 × 1 port (EtherNET), extension slots: PCI Express 3.0 × 8 or above

Objective lens for white light interference measurement WLI Plan Apo

WLI-Unit

Scheduled for autumn 2024 release

Features

> New design matching the WLI-Unit > Ensures long working distance while more compact and lighter-weight (parfocal 60 mm) > High NA, high resolution > Plan apochromat

> Beam splitter and reference mirror mounted inside objective lens > Interference fringe adjustment mechanism equipped as standard

Dimensions

WLI Plan Apo 2.5X

WLI Plan Apo 5X

WLI Plan Apo 10X

WLI Plan Apo 25X

WLI Plan Apo 50X

ø40

58.5

M20.32/36 山

ø35

22.1

ø38

Lens specifications

Mirror tube length

FOV (mm)

Applicable tube lens f (mm)

Parfocalizing distance (mm)

Mass (g)

W.D. (mm)

Model Code No.

Outermost diameter Mounting screws

f (mm)

N.A.

R (µm)

2/3 inch camera

(excluding mounting screws)

WLI-Unit

WLI Plan Apo

36.4 ( excluding interference unit ) 58.5 ( Max )

WLI Plan Apo 2.5X 378-400

0.14

13.0

2.0

2.94×2.25 2.64×3.52

100

320

WLI Plan Apo 5X 378-005 WLI Plan Apo 10X 378-401 WLI Plan Apo 25X 378-402 WLI Plan Apo 50X 378-403

0.28

8.0

0.98

1.46×1.12

1.32×1.76

100

210

RMS / 20.32 mm ×36 TP

0.38

6.0

0.72

0.73×0.56 0.66×0.88

100

220

0.50

3.6

0.55

0.29×0.22 0.26×0.35

100

290

0.70

2.0

0.39

0.14×0.11

0.13×0.18

100

300

•Resolution values in the specifications above are calculated based on reference wavelength ( λ = 0.55 μm).

WLI Measurement Example

Roughness specimen 3 μm

Semiconductor test pattern (TEG)

Provided by Walts Co., Ltd. and ASK INDEX

Cu pattern (glass substrate)

Metal machined surface (Aluminum)

WLI System Configuration ( example with stand/motorized stage/vibration isolation table )

Stand*

WLI-Unit Sensor Head

WLIPAK SampleGUI Implements WLI measurement

MCubeMap Implements analyses

WLI-Unit Controller

*Image is for illustration purposes

Ex.: 3D display

Vibration Isolation table*

*Stand and vibration isolation table are recommended products

Dimensions

WLI-Unit Sensor Head

WLI-Unit Controller

108

196

Mounting screws 2×1/4 depth 6

Guide pin holes Depth 4

+0.01 0

Mounting screws 2×1/4 depth 6

Guide pin holes Depth 4

2 +0.01 0 Back mounting part

Microscope unit FS70

FS70Z

FS70L

FS70L4

The eyepieces, revolver and objectives shown mounted are optional.

Features

> Product range supporting various observation methods (Bright-field/dark-field/simple polarization/differential interference contrast (DIC)) > Equipped as standard with a Koehler illumination with aperture diaphragm for epi-illumination optical systems > High operability with microscopes (Inward revolver design and long-working-distance objectives) *1 : The performance and safety of laser-equipped system products is not guaranteed. *2: An infrared source and infrared camera are necessary. For more details on infrared observation, contact your local Mitutoyo sales office.

> Compact microscope unit with trinocular eyepiece tube (Suitable for observation of many different types of object: metal surfaces, semiconductors, LCDs, resins, etc.) > Can used with YAG (near-infrared, visible, near-ultraviolet, or ultraviolet) lasers. *¹ (Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-films (insulating film) and repair of color filters). > Compatible with infrared optical systems *²

SF70 dimensions

27.2

324

154

324

154

Intermediate image position

154

Intermediate image position

154

Laser mount Vertical travel

ø38 Intermediate image position

Intermediate image position

25 25 Vertical travel ø38

Laser mount Vertical travel

Laser moun Vertical trave

Laser mount Vertical travel

25 25

ø38

25 25

ø38

25 25 Vertical travel

ø38

25 25 Vertical travel

25 25

Objective mounting surface

MAX 78

MAX130

MAX 78

MAX130

153 (Mounting surface)

1 MAX130

153 (Mounting surface)

MAX 78

1 MAX130

MAX 78

MAX130

MAX 78 154

MAX130

MAX 78 154

MAX130

153 (Mounting surface)

154

FS70Z(FS70ZD)

FS70L

FS70L4

ø7.5 ø10 +0.1

+0.05

ø7.5 ø10 +0.1

Fiber-optic cable end position +0.05

4-M4 screw holes, depth 8

+0.05

Fiber-optic cable end position

4-M4 screw holes, depth 8

Fiber-optic cable end position

4-M4 screw holes, depth 8

63.5 94

Back of standard focus unit (for all models)

Detail of fiber mount (for all models)

Specifications

FS70

FS70Z

FS70ZD

FS70L

FS70L4

— —

Model No. Code No. Model No. Code No.

Standard head type

378-184-1

378-185-1

378-186-1 FS70L-TH 378-186-3

378-187-1 FS70L4-TH 378-187-3

Made-to-order FS70ZD-TH Made-to-order

FS70-TH 378-184-3

FS70Z-TH 378-185-3

— —

Tilting head type

Erect image

BF (Bright-field) BD (Bright-field/ Dark-field) Polarization Differential interference contrast (DIC)

✔

Observation image

✔

10X (field number 24) · 15X (field number 16) · 20X (field number 12)

Eyepieces (required option)

Field number Eye width adjustment

Siedentopf, adjustable interpupillary distance range: 51 - 76 mm

Tilt angle

0 to 20° (only for -TH), displacement of eye point: approx.114 mm

Fixed type (Eyepiece/TV = 50/50)

Switchable type (Eyepiece/Tube = 100/0: 0/100)

Fixed type (Eyepiece/TV = 50/50)

Switchable type (Eyepiece/Tube = 100/0: 0/100)

Fixed type *¹ (Eyepiece/TV = 50/50)

Switchable type (Eyepiece/Tube = 100/0: 0/100)

Optical pass ratio

Trinocu - lar tube

C-mount receptacle (with green filter switch) (with parfocal adjust - ment)

Camera port Mount

C-mount (using optional adapter B*²) Parfocal adjustment with adapter B

Use a laser with TV port.

Optical tube

Protective filter

—

Built-in laser beam filter

Tube lens

1X-2X zoom

Magnification: 1X λ : 355/532/1064 nm YAG laser source (fundamental, second and third harmonic mode) available

Magnification: 1X λ : 266/532 nm YAG laser source (second, fourth harmonic mode) available

Optical features

Laser port

—

Mount

Coarse and fine movement

Micro- scope head

Uniaxial coarse and fine movement (Coarse: 3.8 mm/rev. fine 0.1 mm/rev.)

Movement

50 mm, left and right handle

Optical system epi-illumination

Epi-illumination for bright-field (Koehler illumination, with aperture diaphragm)

Fiber illumination unit (LED) ( No.176-386 ), 150 W fiber-optic illumination unit ( No.176-316 ) stepless adjustment, light guide length: 1500 mm

Illumination unit (optional)

Manual revolver nosepiece unit quad / Power revolver nosepiece unit quad

Self-aligning manual revolver nosepiece unit quad / self-aligning power revolver nosepiece unit quintuple

Self-aligning manual revolver nosepiece unit quad / Self-aligning Power revolver nosepiece unit quintuple

Revolver (required option)

M Plan Apo M Plan Apo HR M Plan Apo SL G Plan Apo

BD Plan Apo

For observation

Suitable objective (required option)

NIR Series NUV Series *Select from wavelengths used by laser source 14.1 kg (tilting headtype: 13.2 kg)

UV Series

For laser cutting

—

14.2 kg (tilting headtype: 13.5 kg)

13.9 kg (tilting headtype: 13.1 kg)

Loading * 3

14.5 kg

13.6 kg

14.1 kg

13.2 kg

Dimensions

Refer to P.20

6.6 kg (tilting headtype: 7.5 kg)

6.4 kg (tilting head type: 7.2 kg)

6.7 kg (tilting head type: 7.5 kg)

Mass (main unit)

6.1 kg

7.1 kg

6.6 kg

7.5 kg

*1: It is a switchable type when using FS70ZD-TH (Tilting head type). *2: Installation is optional. *3: Loading on optical tube excluding weight of revolvers, objective lenses and eyepieces. Note: When using the objective M Plan Apo 1X, using this lense with a differential interference contrast unit (No.378-092 or 378-094) is recommended.

Note: Observe the following precautions when using FS70L or FS70L4 with YAG laser source attached. · Be aware of the laser power and energy density limitations of the optical system to avoid damaged. · Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.

System diagram

C-mount compatible analog camera or digital camera

Third-party YAG lasers* 1

Differential interference contrast unit ( 378-076 , 378-078 , 378-079 , 378-080 ) P.23

0.5X TV adapter unit ( 375-054 ) P.23

Polarizer (C) ( 378-094 ) P.23

Eyepieces P.39 WF10X/24 ( 378-866 ) WF20X/12 ( 378-858 )

Polarizer (A) ( 378-092 ) P.23

Adapter B ( 378-042 ) P.23

FS70 ( 378-184-1 )

FS70ZD

FS70Z ( 378-185-1 )

FS70L ( 378-186-1 )

FS70L4 ( 378-187-1 )

FS70Z-TH ( 378-185-3 )

FS70-TH ( 378-184-3 )

FS70ZD-TH

FS70L-TH ( 378-186-3 )

FS70L4-TH ( 378-187-3 )

Simple stand ( 378-730 ) P.25

Manual revolver nosepiece unit (for BF/DF) ( 176-211 ) P.23 Quad

Self-aligning manual revolver nosepiece unit (for BF) ( 378-018 ) P.23 Quad

Self-aligning Power revolver nosepiece unit (for BF) Quad ( 378-016 ) Quintuple ( 378-216 ) P.23

Power revolver nosepiece unit (for BF/DF) ( 176-212 ) P.23

Quad

Quintuple

Transmitted light unit ( 378-736 ) P.25

Objectives M Plan Apo series (for observation): P.26 to 28 G Plan Apo series (for observation): P.28 NIR series on P.30 to 31 (for fundamental/second harmonic laser machining) (for near-infrared observation) NUV series on P.32 to 33 (for second/third harmonic laser machining) UV series on P.34 to 35 (for second/fourth harmonic laser machining)

Fiber-optic illumination unit 150 W ( 176-316 ) P.25

Fiber illumination unit (LED) ( 176-386 )

P.25

Fiber-optic illumination unit 150 W ( 176-316 ) P.25

Fiber illumination unit (LED) ( 176-386 )

Objectives BD Plan Apo series (for observation): P.29

P.25

X-Y stage (50×50 mm) ( 378-020 )

Third-party motorized X-Y stages (50 × 50 mm) * 2

*1: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *2: An adapter may separately be required when mounting any of these stages. Consult Mitutoyo for more information.

P.25

Optional Accessories for FS70

Manual revolver

Power revolver

Console box

378-016

Code No.

378-018

176-211

378-216

378-016

176-212

Observation method

Bright-field

Bright /Dark-field

Observation method

Bright-field

Bright /Dark-field

4 (1 reference hole and 3 holes with centering and parfocal adjustment)

5 (1 reference hole and 4 holes with centering adjustment)

4 (1 reference hole and 3 holes with centering adjustment)

No.of objective mounts

No. of objective mounts

View field adjustment Parfocal adjustment

±0.5 mm ±0.5 mm

— —

View field adjustment Positioning accuracy

±0.5 mm

— —

2 σ = 3 μm

—

Mass

980 g

1.2 kg

1 million repositioning operations

Durability (life-time)

—

Polarizer and analyzer

Drive method Power supply

DC motor

AC100 V - 240 V, 10 W

AC100 V - 240 V, 6 W

For simplified polarized-light observation. Also suitable for enhancing contrast of low-magnification objectives.

RS-232C* 1 for external PC control

Output interface

2.9 m* 2 (connection of power revolver and console box)

Cable length

Revolver: 164x65x137 mm, 1.4 kg ( 378-216 : 130x47x186 mm, 1.7 kg) Console box: 108x72x193 mm, 810 g ( 378-216 : 108x63x176 mm, 810 g)

Dimensions (WxHxD) and mass

For FS70L • FS70L4 378-094

For FS70Z 378-092

DIC unit

Used for differential interference contrast observation in conjunction with the polarizer.

Code No. 378-076 378-078 378-079 378-080

Magnification

100X, SL80X, SL50X

50X, SL20X

20X

10X, 5X

Adapter B

Allows observation over a wide field of view on the monitor (2X wide) due to the 0.5X relay optics. It is used in conjunction with the optional adapter B. A C-mount is included. 0.5X TV adapter unit

Used for mounting a C-mount camera.

ø45

Intermediate image position

ø45

+0.05 0

ø38

ø54

74.1

375-054 View field of image: ø11 mm Mass: 300 g

378-042 View field of image: ø11 mm Mass: 170 g

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