PREN - 1457(5) - Microscope Units and Objectives (UV, NUV, …

Commentary: Laser Operating Method and Precautions

Laser input conditions of laser-equipped microscope unit Determine the upper limit value of laser input under the following conditions. Laser radiation incident on the optical system shall be axial and non- polarized. Each VMU and FS70 series of Mitutoyo microscope units uses a built-in laser [mainly, Nd-YAG laser fundamental wave (1064 nm), second harmonic (532 nm), third harmonic (355 nm) and fourth harmonic (266 nm)] to allow laser machining. In laser machining with a laser-equipped microscope unit and a microscope objective, high-power laser irradiation is not allowed for the purpose of microfabrication. IMPORTANT : Review laser safety precautions prior to use.

VMU series Applicable model

VMU-LB

VMU-L4B

355

266

Wavelength used (nm) Pulse laser Upper input limit (J/cm 2 ) Pulse width (10 ns)

1064

532

355

1064

532

0.099

0.075

0.025

0.11

0.080

0.035

0.015

Upper limit to CW laser input (kW/cm 2 )

0.22

0.18

0.07

0.2

0.19

0.05

0.05

FS70 series Applicable model

FS70L

FS70L4

266

Wavelength used (nm) Pulse laser Upper input limit (J/cm 2 ) Pulse width (10 ns)

1064

532

355

532

0.090

0.075

0.018

0.075

0.015

Upper limit to CW laser input (kW/cm 2 )

0.23

0.18

0.06

0.2

0.05

Upper limit to objective laser input Determine the upper limit value of laser input under the following conditions if the laser radiation directly enters the objective. Laser radiation incident on the optical system shall be axial.

VMU series

NIR series NUV series UV series

NIR series

NUV series

UV series

Applicable objective

Wavelength used (nm) Pulse laser Upper input limit (J/cm 2 ) Pulse width (10 ns)

1064

532

355

266

0.2

0.1

0.05

0.04

Upper limit to CW laser input (kW/cm 2 )

0.5

0.25

0.16

0.12

Note: If the pulse width of the laser is shortened, reduce the irradiation energy density by the square root of the ratio of the new pulse width to the initial pulse width. Example: If the pulse width decreases to 1/4 of the initial width, reduce the energy density to approximately 1/2. Therefore when using a laser with a wavelength of 1064 nm and a pulse width of 2.5 ns, the upper limiting value of input will be 0.1 J/cm 2 .

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