PREN - 1457(5) - Microscope Units and Objectives (UV, NUV, …

Ultraviolet radiation range objectives for bright-field observation M Plan UV

VMU FS70

Features

> Bright-field observation/ultraviolet observation/laser machining > Wavelength compensation 266 nm and 550 nm > Infinity corrected > Long working distance > Plan

Dimensions

M Plan UV 10X

M Plan UV 50X

20 (Working distance)

12 (Working distance)

83

75

5

5

( Parfocalizing distance ) 95

( Parfocalizing distance ) 95

M Plan UV 20X

M Plan UV 80X

10 (Working distance)

15 (Working distance)

80

85

5

5

( Parfocalizing distance ) 95

( Parfocalizing distance ) 95

Specifications

Real FOV (mm)

f (mm)

Mass (g)

R (μm) ( λ = 550 nm)

±DOF (μm)

Model

N.A.

W.D. (mm)

Code No.

ø24 eyepiece 2/3 inch camera

f 266

f 550

M Plan UV

M Plan UV 10X M Plan UV 20X M Plan UV 50X M Plan UV 80X

378-844-15 378-837-8 378-838-8 378-839-5

0.25 0.37 0.41 0.55

20.0 15.0 12.0 10.0

20 10

20.3 10.4

1.1 0.7 0.7 0.5

4.4 2.0 1.6 0.9

2.4 1.2

0.66×0.88 0.33×0.44 0.13×0.18 0.08×0.11

310 370 400

4

4.2 2.9

0.48

2.5 380 •  When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times ( f= 200 mm, Mitutoyo tube lens). Since the focal length (f) in ultraviolet radiation ( λ = 266 nm) is slightly smaller than that in visible radiation ( λ = 550 nm) as above, the working area in ultraviolet radiation also becomes slightly smaller than the mask image in visible radiation. • Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength ( λ = 0.55 μm). 0.3

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