Applications
Optical inspection with wide field of view
White light interference analysis
WLI-U + interference objective lens *System example with fixed stand/stage
WIDE VMU-HR
Lineup supporting various observation methods, including bright-field, dark- field, polarizing, differential interference, near infrared, high resolution, etc. Inspection process can be streamlined with wide field of view model.
Compact design realizes non-contact high-accuracy fine surface shape analysis through white light interference. ⇒ 3D shape measurement, 3D roughness measurement
Laser fine machining
IR analysis/inspection
Flaking of polyimide membrane
WIDE VMU-HR + NIR objective
UV laser application using VMU-L4B (Source of photographs: V-Technology Co.,Ltd.)
Infrared analysis inspection is possible in combination with a microscope unit supporting NIR series objective lenses. > Transmission analysis of silicon materials > Non-destructive evaluation of MEMS interiors > Internal observation of semiconductor packages (IC)/wafer junction void evaluation > Infrared spectral characteristics analysis, etc.
Objectives compatible with YAG lasers (1064 nm, 532 nm, 355 nm and 266 nm) allow high precision and quality work. > Removal of protective films/organic films, etc. > Cutting of IC wiring (Au, Al) and exposure of lower layer pattern > Fine photomask and FPD repair, etc Color filter working
High/low magnification microscope (dual-camera)
All-focus image generation
2/3 inch Camera (low magnification)
1/2 inch Camera (high magnification)
Two cameras can be used by mounting a constant magnification camera mount on the VMU-LB/LB4 laser port. ⇒ The same area can be observed simultaneously at different magnification (Low magnification: 2/3" camera, high magnification: 1/2" camera, etc.)
TAGLENS-T1
Ultra-high-speed focus range variation from low to high magnification lens, no mechanical vertical drive for focused images, arbitrary cross-section image acquisition possible. *For details, see the No. 14025 TAGLENS catalog
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